Photomask Inspection

Phiplastic systems automate optical inspection of wiring and identify not only differences between a photomask and a standard, but also tolerance violations in the standard itself (design rule check, DRC). Verification of topology is fully automated; detected defects are displayed to user for a final decision.

Typically high demands on precision take place in photomask inspection. Phiplastic can use the highest resolution of modern flatbed scanners (which is about 5 microns per pixel) and allows to work with very large images. Moreover, inspection can be spitted in parts (overlapping) without prejudice to the completeness and accuracy. It is useful when photomask cannot be scanned as a whole, or image size is too large for workstation and operating system being used.

Space tolerance violation
Wrong size of the pad

Flatbed scanner, as well as any other equipment, has errors. For photomask inspection this means that geometry of images may differ from geometry of scanned items. Phiplastic provides a geometric calibration that ensures the accuracy of measured dimensions and distances, as well as a reliable detection of film stretching defects.

For photomask inspection it's recommended to use Inspection solution, but with strict financial limits Gold can be used. This choice influences on the list of automatically detected defects, and ultimately determines performance of the system and the human factor.

See also: other stages in the PCB production, where Phiplastic systems are used.